Comparison ledger
Cascade Microtech R 6100, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | R 6100Cascade Microtech | 1007KLA |
|---|---|---|
| OEM | Cascade Microtech | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech R 6100 | KLA 1007 |
| Specifications | ||
| Configuration | Thermal chuck plus X/Y/Z/θ servos[1] | — |
| Make | Cascade Microtech[1] | KLA[4] |
| Model | R 6100[1] | 1007[3] |
| Wafer sizes | 8 inch[1] | — |
| Travel | 8-inch travel[2] | — |
| Resolution | Sub-micron resolution[2] | — |
| Motion control | Precise motion control[2] | — |
| Manufacturer | — | KLA[3] |
| Description | — | Wafer Prober[3] |
| Wafer size | — | 150 mm[3] |
| Convertible to 8 inch wafer size | — | Yes[3] |
| Vintage | — | 01.06.1995[3] |
| Equipment type | — | Prober[4] |
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