Waferpedia

KLA

1007

Test & Probe
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

KLA1007
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What it is

The KLA 1007 is a wafer prober manufactured by KLA. The KLA 1007 is configured for 150 mm (6 inch) wafers and is convertible to 200 mm (8 inch) wafers.[2][3][4][5][6][1][7]

How it works

General reference — not yet source-verified

The KLA 1007 positions a wafer on a precision chuck that moves the wafer under a probe card. The probe card contains fine needles that align to the bond pads of each die. The machine then lowers the card to make contact, enabling electrical tests to be performed by a test head connected to the system.

Where it fits in the process flow

General reference — not yet source-verified

Wafer probers are used in the semiconductor test flow after wafer fabrication is complete and before the wafer is diced into individual chips. The KLA 1007 performs sort testing at the wafer level, identifying known good die and marking defective die for rejection.

What do the numbers mean?

Wafer handling3

Description
Wafer Prober[1]
Accurate?
Wafer size
150 mm[1]
Accurate?
Convertible to 8 inch wafer size
Yes[1]
Accurate?

Configuration & options3

Manufacturer
KLA[1]
Accurate?
Model
1007[1]
Accurate?
Vintage
01.06.1995[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What type of equipment is the KLA 1007?

The KLA 1007 is a wafer prober.[2][3][4][5][6][1][7]

What wafer sizes does the KLA 1007 support?

The KLA 1007 is configured for 150 mm wafers and is convertible to 200 mm (8 inch) wafers.[1]

Not publicly documented

The following facts about the 1007 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 1007 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 1007 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 1007 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 1007 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 1007 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (8)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]Equipment inventory listing
  7. [7]KLA 1007 Wafer Prober for sale / JMC Worldwide Semiconductor Equipmentjmcserv.comjmcserv.com
  8. [8]Equipment inventory listing
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Last updated Aug 13, 2026.

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