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SVO 9 ZZMFG Vacuumversus1000 Hot Plate

Cascade Microtech SVO 9 ZZMFG Vacuum, CEE 1000 Hot Plate, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SVO 9 ZZMFG VacuumCascade Microtech
OEMCascade MicrotechCEE
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech SVO 9 ZZMFG VacuumCEE 1000 Hot Plate
Specifications
Maximum temperature260°C[1]—
Interior Dimensions24” H x 24” D x 28” W[1]—
Configuration208/240V, 1 Ph, 50/60 Hz.[1]4"[4]
Power208/240V, 1 Ph, 50/60 Hz[1]—
Vacuumwith Vacuum Pump[3]—
ControllerWatlow 981 Programmable Controller[2]—
CapacityLarge Capacity[2]—
Type—Hot Plate[4]
Wafer Size—4 inch[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing