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Comparison ledger

100 CB SpinversusSyrus Pro 710 Vacuum

CEE 100 CB Spin, Leybold Syrus Pro 710 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMCEELeybold
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Leybold Syrus
Cited variants
  • CEE 100 CB Spin Coater Hot Plate[1]
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Specifications
ConfigurationWith brake plates[2]Stainless steel chamber with flat door of aluminum[3]
Configuration & optionsWith brake plates[2]—
Chamber inner diameter—700 mm[3]
Pirani transmitter range—1000 mbar to 10E-3 mbar[3]
Bayard Alpert transmitter range—10E-3 mbar - 10E-9 mbar[3]
Line voltage—3AC400V/230V/+/-10%[3]
Line frequency—50 Hz (60 Hz optional)[3]
OEM—Leybold[3]
Model—Syrus Pro 710 Vacuum[3]
Category—Deposition[4]
Type—vacuum coater[3]
Chamber—stainless steel chamber with flat aluminum door[3]
Viewing port—1 viewing port with polarization filter[3]
Vacuum chamber—water-cooled[3]
Water distribution system—for warm and cold water[3]
Compressed air distribution system—present[3]
Control system—SYRUSpro control system[3]
Main electrical cabinet location—assembled on right hand side of vacuum chamber[3]
Vacuum measurement equipment—2 Pirani transmitters, 1 Ionivac transmitter, 1 Penningvac transmitter[3]
Electrical connection point—3-phases, full loaded Neutral, PE[3]
Vintage—2008[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com