Waferpedia

Comparison ledger

1000 Hot PlateversusTSA 71 S Thermal Shock

CEE 1000 Hot Plate, ESPEC TSA 71 S Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

Email
Side-by-side comparison of selected equipment models
Attribute
OEMCEEESPEC
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateESPEC TSA
Specifications
Configuration4"[1]50/60Hz[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Voltage—200V[2]
Make—ESPEC[2]
Model—TSA 71 S[2]
Equipment Type—Thermal Shock Chamber[2]
Electrical—200V - 50/60Hz - Max. 80Amps[2]
Vintage—2005[2]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing