Waferpedia

Comparison ledger

1000 Hot PlateversusThermco 5000 Diffusion

CEE 1000 Hot Plate, SVG Thermco 5000 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMCEESVG
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateSVG Thermco 5000 Diffusion
Cited variants—
  • Thermco 5100[1]
  • Thermco 5200[1]
Specifications
Configuration4"[2]—
TypeHot Plate[2]—
Wafer Size4 inch[2]—
OEM—SVG Thermco[3]
Model—5000[3]
Equipment type—Diffusion furnace[3]
Wafer size—6 inch[3]
Series—Thermco 5000 series[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]thermcosystems.comthermcosystems.com
  2. [2]inventory listing
  3. [3]Equipment inventory listing