Comparison ledger
CEE 200 Spin, EV Group 120 Automated Coater Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 SpinCEE | 120 Automated Coater ProcessingEV Group |
|---|---|---|
| OEM | CEE | EV Group |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE 200 | EV Group 120 Automated Coater Processing |
| Specifications | ||
| Phase | 1 Phase[1] | 3 Phase[3] |
| Type | Spin Coater[1] | — |
| Model | 200[1] | — |
| Make | CEE[1] | — |
| Wafer Sizes | 8 inch[1] | — |
| Configuration | 1 Phase[1] | 50/60 Hz[3] |
| Equipment type | Spin Coater[1] | — |
| Spin speed | 5000 rpm[2] | — |
| Substrate support | Flat substrates up to 200 mm or fragments[2] | — |
| Substrate thickness max | 12 mm[2] | — |
| Coating thickness | Uniform coating thickness up to 100 µm[2] | — |
| Wafer sizes | — | 6 inch, 8 inch[3] |
| Frequency | — | 50/60 Hz[3] |
| Wiring configuration | — | 4 Wire + GND[3] |
| Vintage | — | 2015[3] |
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