Comparison ledger
CEE Apogee 450 Spin, CEE Apogee Spin, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Apogee SpinCEE | |
|---|---|---|
| OEM | CEE | CEE |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | CEE Apogee | CEE Apogee |
| Specifications | ||
| Configuration | 208-240 V[1] | Polymide[4] |
| Model | Apogee 450[1] | Apogee[4] |
| Equipment type | Spin coater[1] | — |
| Wafer sizes | 6, 8, 12 inch[1] | — |
| Max substrate size | 450 mm round or 14" x 14" square[2] | — |
| Max spin speed | 6,000 rpm[2] | — |
| Max acceleration | 30,000 rpm/s[2] | — |
| Spin speed repeatability | 0.2 rpm[2] | — |
| Acceleration resolution | < 0.2 rpm/s[2] | — |
| Spin speed resolution | 0.2 rpm[2] | — |
| GUI | 7-inch full-color touchscreen[2] | — |
| Number of recipes | Unlimited[2] | — |
| Step time resolution | 0.1 s[2] | — |
| Weight | 85 lb (38.6 kg)[2] | — |
| Voltage | 208-230 VAC[2] | — |
| Drain port | 3/4" OD[2] | — |
| Full load current | 6A (max)[2] | — |
| Exhaust port | 1.5" OD, 0.4” H2O @ 30 CFM (100 Pa @ 50 CMH)[2] | — |
| Vacuum | 1/4" push to connect, <33 kPa abs[2] | — |
| Automated dispense gas | N2/CDA, 70 psi (482 kPa)[2] | — |
| Interface | USB 2.0, Ethernet, StreamSync™ communication protocol[3] | — |
| Chamber material | HDPE spin bowl[3] | — |
| Vacuum and lid interlock | Yes[3] | — |
| OEM | — | CEE[4] |
| Equipment name | — | CEE Apogee Spin Coater[5] |
| Installed modules | — | Spin coater, bake plate, and vapor primer bake plate[6] |
| Spin chuck type | — | Circular vacuum chucks[6] |
| Recommended substrate size range for 4-inch chuck | — | 5 inches to 8 inches in diameter (125 mm to 200 mm)[6] |
| Spin coater standard substrate thickness | — | 275-750 μm[6] |
| Maximum recommended spin speed and acceleration range | — | 3,000 to 6,000 rpm for standard thickness substrates[6] |
| Bake plate holding temperature | — | 115 degrees C[6] |
| Vapor HMDS bake plate holding temperature | — | 100 degrees C[6] |