Waferpedia

CEE

Apogee Spin

CEE Apogee family
Research Quality: 40% complete
Email

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The CEE Apogee Spin Coater is a semiconductor manufacturing tool. The CEE Apogee Spin Coater is used for photolithography and surface preparation processes. The CEE Apogee Spin Coater supports circular vacuum chucks, and a 4-inch chuck is recommended for 5-inch to 8-inch diameter substrates.[1]

Apogee Spin — Inventory photo
Fig. 01Apogee SpinInventory photo[2]

What it is

The CEE Apogee Spin Coater is a piece of semiconductor manufacturing equipment. The identified model is Apogee, and the equipment name is CEE Apogee Spin Coater.[2]

What do the numbers mean?

Vacuum & pumping1

Spin chuck type
Circular vacuum chucks[1]
Accurate?

Wafer handling3

Recommended substrate size range for 4-inch chuck
5 inches to 8 inches in diameter (125 mm to 200 mm)[1]
Accurate?
Spin coater standard substrate thickness
275-750 μm[1]
Accurate?
Maximum recommended spin speed and acceleration range
3,000 to 6,000 rpm for standard thickness substrates[1]
Accurate?

Configuration & options7

Polymide[2]
Accurate?
OEM
CEE[2]
Accurate?
Model
Apogee[2]
Accurate?
Equipment name
CEE Apogee Spin Coater[3]
Accurate?
Installed modules
Spin coater, bake plate, and vapor primer bake plate[1]
Accurate?
Bake plate holding temperature
115 degrees C[1]
Accurate?
Vapor HMDS bake plate holding temperature
100 degrees C[1]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Spin chuck typeCircular vacuum chucks[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the equipment?

It is a CEE Apogee Spin Coater.[2]

What is the model?

The model is Apogee.[2]

Not publicly documented

The following facts about the Apogee Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Apogee Spin are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Apogee Spin are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Apogee Spin are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Apogee Spin are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Apogee Spin is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]aggiefab.tamu.edu — aggiefab.tamu.eduaggiefab.tamu.edu
  2. [2]Inventory photo
  3. [3]nanofab.utah.edunanofab.utah.edu
Was this page accurate?

Last updated Oct 19, 2026.

Compare with similar tools

View all →