Comparison ledger
CHA Mark 50, CHA Mark 50 E-Beam, CHA Mark 50 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Mark 50CHA | ||
|---|---|---|---|
| OEM | CHA | CHA | CHA |
| Category | Deposition | Deposition | Deposition |
| Wafer size | — | — | — |
| Process node | — | — | — |
| Introduced | — | — | — |
| Production run | — | — | — |
| Lifecycle | — | — | — |
| Lifecycle milestones | — | — | — |
| Control system | — | — | — |
| Generation | — | — | — |
| Family | CHA Mark 50 | CHA Mark 50 | CHA Mark 50 |
| Specifications | |||
| Configuration | updated to control the deposition and chambers.[1] | 110 / 220 Vac[4] | 175 Amps[9] |
| Process type | Physical Vapor Deposition (PVD)[2] | — | — |
| Wafer size | 6 inch[2] | — | — |
| Deposition type | Thin-film deposition[3] | — | — |
| Control upgrade | Computer added to track processes[1] | — | — |
| Power supply upgrade | New Glassman voltage supply[1] | — | — |
| Controller upgrade | Updated Infinicon controller[1] | — | — |
| OEM | CHA[2] | — | — |
| Model | Mark 50[2] | Mark 50[7] | Mark 50[9] |
| Equipment type | PVD (Physical Vapor Deposition)[2] | E-Beam Evaporator[7] | Vacuum evaporator[8] |
| Wafer sizes | 6 inch[2] | — | — |
| Process update | Updated to control the deposition and chambers[1] | — | — |
| Control/process additions | Computer added to track processes[1] | — | — |
| Voltage unit | New Glassman voltage[1] | — | — |
| Measurement unit | Updated Inficon[1] | — | — |
| Phase | — | 3 Phase[4] | 3 Phase[8] |
| Frequency | — | 50 Hz[4] | 60 Hz[8] |
| Power Supply | — | 3 Phase, 110/220 Vac, 50 Hz[4] | — |
| Wires | — | 5[4] | — |
| Compressor | — | CTI 9700 A[4] | — |
| E-Beam Power Supply | — | Ulvac HPS 1000 F[4] | — |
| Transformer | — | IMAI NT 3 X[5] | — |
| CHA SR 10 | — | Included[5] | — |
| Vintage | — | 2016[4] | — |
| Compatibility | — | Class A and B Metals and Compounds[6] | — |
| Restrictions | — | No high vapor pressure materials; no oxide evaporation[6] | — |
| Voltage | — | 110/220 Vac[4] | 208 VAC[8] |
| Vintage Year | — | 2016[4] | — |
| Location (CNF) | — | Room 110[6] | — |
| Category | — | E-Beam Evaporator[7] | Deposition[8] |
| Electrical Specifications | — | 3 Phase - 110 / 220 Vac - 50 Hz - 5 Wires[4] | — |
| Additional Components | — | CHA SR 10 - IMAI NT 3 X Transformer[5] | — |
| Class Compatibility | — | 5 - Class A and B Metals and Compounds[6] | — |
| Make | — | CHA[7] | CHA[9] |
| Tool location | — | 110[6] | — |
| Power configuration | — | 3 Phase[4] | — |
| Input power | — | 110 / 220 Vac[4] | — |
| Wiring | — | 5 wires[4] | — |
| E-beam power supply | — | Ulvac HPS 1000 F E-Beam Power Supply[4] | — |
| Current | — | — | 175 amps[8] |
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