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CHA

Mark 50 E-Beam

DepositionCHA Mark 50 family
Research Quality: 20% complete
Mark 50 E-Beam — Inventory photo
Fig. 01Mark 50 E-BeamInventory photo[1]

What is it?

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Needs to fix some parts
  • No high vapor pressure materials on substrates or sources in the evaporator
  • Only approved materials are to be evaporated
  • No oxide evaporation is done in this tool

What do the numbers mean?

Power & electrical3

Phase
3 Phase[1]
Accurate?
Frequency
50 Hz[1]
Accurate?
Ulvac HPS 1000 F E-Beam Power Supply[1]
Accurate?

Configuration & options7

110 / 220 Vac[1]
Accurate?
5 Wires[1]
Accurate?
CTI 9700 A Compressor[1]
Accurate?
Needs to fix some parts[1]
Accurate?
110/220 Vac[2]
Accurate?
CHA SR 10[2]
Accurate?
IMAI NT 3 X Transformer[2]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Phase3 Phase[1]
  • Frequency50 Hz[1]
  • ConfigurationUlvac HPS 1000 F E-Beam Power Supply[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Not publicly documented

The following facts about the Mark 50 E-Beam are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Mark 50 E-Beam are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Mark 50 E-Beam are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Mark 50 E-Beam are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Mark 50 E-Beam is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Mark 50 E-Beam are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Inventory photo
  3. [3]Inventory photo
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing
  6. [6]CHA Mark 50 E-beam Evaporator | CNF Userscnfusers.cornell.educnfusers.cornell.edu
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Last updated Jul 29, 2026.

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