Comparison ledger
Dektak 6 M Stylus, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 6 M StylusDektak | |
|---|---|---|
| OEM | Dektak | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Dektak 6 M Stylus | KLA .204 PSL Wafer |
| Specifications | ||
| Maximum step height | 1 mm[1] | — |
| Vertical resolution | 0.1 nm[1] | — |
| Minimum resolvable step height | 200 angstroms (20 nm)[2] | — |
| Point-to-point resolution | 1 angstrom (0.1 nm)[2] | — |
| Scan length range | 50 µm to 30 mm[1] | — |
| Stylus force range | 9.8 mN to 147 mN (1 mgf to 15 mgf)[1] | — |
| Maximum sample thickness | 31 mm[1] | — |
| Stylus tip radius | 12 µm[2] | — |
| Horizontal resolution | well less than 0.1 µm (dependent on scan parameters)[2] | — |
| Repeatability on 5000 Å step | typically a few percent standard deviation[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[4] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[4] |
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