Comparison ledger
Disco DCS1440, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DCS1440Disco | 1000PYES |
|---|---|---|
| OEM | Disco | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | 100mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DCS1440 | YES 1000P |
| Specifications | ||
| Mentioned function | atomizing cleaning[1] | — |
| Associated equipment | DAG810 automatic surface grinder[1] | — |
| Maximum workpiece size | Φ8 inch[2] | — |
| Application frame | 2-8-1[3] | — |
| Table RPM | 100 to 3,000 min⁻¹[2] | — |
| Setting time for cleaning/drying | 0 to 999 sec[2] | — |
| Cleaning nozzle speed | 1 to 37.5 °/sec[2] | — |
| Cleaning range | Φ365 mm (up to 250×250 mm)[2] | — |
| Cleaning pressure range | 2.3 to 11.8 MPa[2] | — |
| Equipment dimensions (W×D×H) | 400 × 600 × 1,220 mm[2] | — |
| Dry mass | Approx. 124 kg[2] | — |
| Maximum square workpiece (optional) | 250×250 mm[2] | — |
| Model | — | 1000P[4] |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Control system | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Configuration | — | Parallel plate[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
| Type | — | Plasma cleaning system[4] |
| Shelves | — | Four 16 x 16 inch shelves[4] |
| Control | — | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
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