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DTG 8460 Wafer Backsideversus15

Disco DTG 8460 Wafer Backside, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
15Lapmaster
OEMDiscoLapmaster
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco DTG 8460Lapmaster 15
Specifications
ConfigurationIncludes DTU 1550[1]—
Chuck table for 12, and 8" is possible[1]—
Each spindle has 2 height gaugeinner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[1]—
Machine typeWafer backside grinder[2]—
Wafer size12 inch[2]—
AccessoryIncludes DTU 1550[1]—
Chuck tableFor 12", and 8" is possible[2]—
Robot pickerFor 12", and 8" is possible[2]—
Spinner tableFor 12", and 8" is possible[2]—
Height gaugeEach spindle has 2 height gauge: inner and outer mechanical IPG (in-line process gauge) on Z1 and Z2 spindles respectively[2]—
IncludesDTU 1550[2]—
Input Power—110 Vac[3]
Plate Diameter—15 inches (381 mm)[4]
Number of Conditioning Rings—3[4]
Ring ID—5.5 inches (140 mm)[4]
Standard RPM—60[4]
RPM Range (Variable Speed Drive)—0-60[4]
Drive Motor - Lapper—0.5 HP (0.37 kW)[4]
Drive Motor - Polisher—0.75 HP (0.56 kW)[4]
Length—25 inches (635 mm)[4]
Width—20 inches (508 mm)[4]
Height—24 inches (610 mm)[4]
Estimated Shipping Weight—285 lbs (129.3 kg)[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]web.archive.orgweb.archive.org