Comparison ledger
Edwards IQDP 80, Edwards IQDP 80 Dry Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | IQDP 80Edwards | IQDP 80 Dry VacuumEdwards |
|---|---|---|
| OEM | Edwards | Edwards |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards IQDP 80 | Edwards IQDP 80 |
| Cited variants | — | |
| Specifications | ||
| (QTY | 2) iQDP80/QMB250 pump/blower combo with control boxes[1] | — |
| Model | IQDP 80[1] | IQDP 80[9] |
| Manufacturer | Edwards[1] | Edwards[9] |
| Pump type | four-stage, positive displacement rotary pump[3] | — |
| Rotor configuration | pairs of intermeshing rotors of different profiles mounted on common shafts[3] | — |
| Drive synchronization | timing-gears[3] | — |
| Lubrication | oil lubricated timing-gears and adjacent double-row angular contact ball-bearings[3] | — |
| Motor cooling | water cooled[3] | — |
| Cooling system | indirect cooling-system[3] | — |
| Weight | 216 kg[4] | 477 lbs[10] |
| Maximum continuous inlet pressure | 1 x 10^5 Pa[5] | 1x10*5 Pa[5] |
| Configuration | — | Refurbished[6] |
| Phase | — | 3 Phase[7] |
| Frequency | — | 60 Hz[7] |
| Voltage | — | 480 V[7] |
| Type | — | Dry Vacuum Pump[9] |
| System description | — | Semiconductor pumping system[5] |
| Typical peak pumping speed at 60 Hz | — | 96 m3/h-1[5] |
| Inlet connection | — | ISO 63[5] |
| Outlet connection | — | NW 40[5] |
| Condition | — | Rebuilt[10] |
| Part number | — | A53280905[10] |
| Inlet | — | ISO63 bolted[10] |
| Exhaust | — | KF40[10] |
| Motor | — | 3 Phase, 200-460V, 50/60Hz[10] |
| Pumping speed | — | 56.5 CFM (60Hz)[10] |
| Ultimate vacuum | — | 7.5 x 10-3 Torr (60Hz)[10] |