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Comparison ledger

QDP 80versusQDP 80 Dry

Edwards QDP 80, Edwards QDP 80 Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
QDP 80Edwards
QDP 80 DryEdwards
OEMEdwardsEdwards
Category—Lab & Support Equipment
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEdwards QDP 80Edwards QDP 80
Cited variants
  • QDP80 Drystar Pump (4 kW)[1]
  • QDP80 Drystar Pump (8 kW)[1]
—
Specifications
Qty2[2]—
Configuration(1) in good order[2]Parts[6]
TypeDry Pump[3]Dry Pump[6]
Pump typefour-stage, positive displacement rotary pump[1]—
Inlet connectionISO63[4]—
Inlet connectionsISO63[1]—
Outlet connectionNW40[4]—
Outlet connectionsNW40[1]—
Motor rating4 kW/6 kW[1]—
Warm-up time to nominal performance15 min[1]—
Typical peak pumping speed80 m3h-1 at 50 Hz; 96 m3h-1 at 60 Hz[1]—
Typical ultimate vacuum without gas-ballast3 x 10-2 mbar at 50 Hz; 3 x 10-2 mbar at 60 Hz[1]—
Mass202 kg[1]—
Weight202 Kg[5]—
ExhaustKF40[5]—
Supply voltage200-208/380-415 V at 50 Hz, 3-phase; 200-230/460 V at 60 Hz, 3-phase[1]—
Protection degreeIP44[1]—
Continuous A-weighted sound pressure level (at 1 meter)< 70 dB(A)[1]—
Warm-up time15 min[5]—
Pumping speed47 CFM (50Hz)[5]—
Ultimate pressure2.3 x 10-2 Torr (50Hz)[5]—
Noise level measured at 1 m from the pump< 70 dB(A)[5]—
Ultimate vacuum2.25 x 10-2 Torr (without gas ballast)[4]—
Make—Edwards[6]
Model—QDP 80[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]docs.chemtechsci.comdocs.chemtechsci.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]provac.comprovac.com
  5. [5]ecjent.comecjent.com
  6. [6]inventory listing