Comparison ledger
EV Group 101, Newport SMC 100 Series Motion Controller Driver, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 101EV Group | |
|---|---|---|
| OEM | EV Group | Newport |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 101 | Newport SMC 100 Series Motion Controller Driver |
| Cited variants | — | |
| Specifications | ||
| OEM | EV Group[2] | — |
| Model | 101[2] | — |
| Equipment name | EVG 101 Spray Coater[2] | — |
| NEMO ID | evgspraycoat[2] | — |
| Training required | EVG 101 Training[2] | — |
| Training duration | 1.50 hours[2] | — |
| Processing technique | Resist Spray Coat (manual)[2] | — |
| Cleanliness | "All"[2] | — |
| Location | SNF Paul G Allen L107 Cleanroom[2] | — |
| Wafer diameter (substrate size) | up to 300 mm[3] | — |
| Available modules | Spin coat / OmniSpray® / develop[3] | — |
| Wafer handling options | Bowed / warped / thin wafer handling, edge handling[3] | — |
| Dispense options | Various resist dispense pumps covering viscosities up to 52000 cP; constant pressure dispense systems; EBR / BSR / pre-wet / bowl wash / liquid priming[3] | — |
| Processing technique (at SNF) | Resist Spray Coat (manual)[4] | — |
| Cleanliness group (at SNF) | "All"[2] | — |
| Command Set | — | 40+ intuitive, 2-letter ASCII commands[1] |
| Computer Interfaces | — | RS-232-C; USB compatible with external SMC-USB adapter[1] |
| Control Algorithm | — | Floating point digital PID loop with velocity and friction feed forward, 2kHz servo rate; backlash and hysteresis compensation[1] |
| Drive Type | — | DC servo motors in open or closed loop (CC model); Open-loop stepper motors control (PP model)[1] |
| ESP Compatibility | — | ESP Stage Detection[1] |
| Motion | — | Point-to-point motion with s-gamma motion profiler allowing acceleration and jerk time control[1] |
| Motor Control | — | CC model: 48 VDC @ 1.5 A rms, 3 A peak; PP model: 48 VDC @ 1.1 A rms per phase; 100 kHz PWM switching frequency[1] |
| Number of Axis | — | 1[1] |
| Interface | — | Two-color LED[1] |
| Dimensions | — | 33 H x 161 W x 140 D (mm)[1] |
| I/O | — | 4 TTL out; 4 TTL in; 1 analog input[1] |
| Software | — | Windows Utility program; LabVIEW drivers[1] |
| Features | — | Daisy-chain up to 31 Controllers[1] |
| Type | — | Single-axis motion controller/driver for DC or stepper motor[5] |
| Communication interfaces | — | RS232, USB (via RS232C to USB converter), RS485[5] |
| Max controllers in daisy chain | — | 31[5] |
| Power supply input | — | 100-240 VAC[5] |
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