Comparison ledger
Filmetrics Profilm3D, Perkin Elmer 1050 UV-VIS, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Profilm3DFilmetrics | 1050 UV-VISPerkin Elmer |
|---|---|---|
| OEM | Filmetrics | Perkin Elmer |
| Category | Precision Optics | Precision Optics |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics Profilm3D | Perkin Elmer 1050 UV-VIS |
| Cited variants |
| — |
| Specifications | ||
| manufacturer | Filmetrics[2] | — |
| model | Profilm3D[2] | — |
| instrument type | optical profiler[2] | — |
| measurement method | profilometry[2] | — |
| step-height accuracy | 0.7% for an 8 µm step[2] | — |
| maximum silicon thickness stated on source page for tabletop/mapping/production systems | up to 2 mm thick[2] | — |
| Instrument type | White light interferometry-based 3D optical profilometer[1] | Spectrometer[4] |
| Measurement modes | Vertical scanning interferometry and phase shifting interferometry[1] | — |
| Thickness range, WLI | 50nm - 10mm[3] | — |
| Thickness range, PSI | 0 - 3μm[3] | — |
| Step-height accuracy | 0.7%[3] | — |
| Step-height precision | 0.1%[3] | — |
| Step-height stability | 0.15%[3] | — |
| X-Y stage travel, Profilm3D | 100mm x 100mm[1] | — |
| X-Y stage travel, Profilm3D-200 | 200mm x 200mm[1] | — |
| Z stage range | 100mm[1] | — |
| Piezo range | 500μm[3] | — |
| Objective magnifications | 5X, 10X, 20X, 50X, 100X[3] | — |
| Field of view at 1X zoom | 4.0mm x 3.4mm at 5X, 2.0mm x 1.7mm at 10X, 1.0mm x 0.85mm at 20X, 0.4mm x 0.34mm at 50X, 0.2mm x 0.17mm at 100X[3] | — |
| Working distance | 9.3mm at 5X, 7.4mm at 10X, 4.7mm at 20X, 3.4mm at 50X, 2.2mm at 100X[3] | — |
| Sample max width | 265mm for Profilm3D; 365mm for Profilm3D-200[3] | — |
| Sample max weight | 2.5kg[3] | — |
| Sample reflectance range | 0.05% - 100%[3] | — |
| Camera | 2592 x 1944 (5 megapixels)[3] | — |
| Measurement principle | White light interferometry (WLI)[1] | — |
| Surface topography resolution | Sub-nanometer-level resolution[1] | — |
| Step height range | Nanometers to millimeters[1] | — |
| X-Y stage travel | 100mm by 100mm for Profilm3D[1] | — |
| Manual tip/tilt stage | ±5° of motion[1] | — |
| Objective lens range | 5X to 100X[1] | — |
| Wafer stage support | Manual R-theta wafer stage supporting 50mm- to 200mm-diameter wafers[1] | — |
| Profilm3D-200 X-Y stage travel | 200mm by 200mm[1] | — |
| Applications | Step height, texture and form, edge rolloff, defect review, high resolution scans over large transparent film surfaces, and high roughness or low reflectivity surfaces[1] | — |
| Application examples | Universities, research labs and institutes; silicon and compound semiconductor; precision optics and mechanics; medical devices; LED; power devices; MEMS; data storage; automotive[1] | — |
| Asset ID | — | 82948[4] |
| Last Confirm Date | — | August 23, 2024[4] |
| Manufacturer | — | Perkin Elmer[4] |
| Model | — | 1050[4] |
| Use | — | Analyzing ultraviolet and visible light absorption spectra[4] |
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