Filmetrics
Profilm3D
Filmetrics Profilm3D is a non-contact white light interferometry-based 3D optical profilometer. Filmetrics Profilm3D measures surface topography, roughness, and step heights from nanometers to millimeters. Filmetrics Profilm3D supports a manual R-theta wafer stage for 50mm to 200mm diameter wafers.[1][2]
Plate 01Filmetrics® Profilm3D® Software Tutorial
KLA InstrumentsWatch on YouTubePlate 02How to Measure a Step Height with the Filmetrics® Profilm3D® Optical Profilometer
KLA InstrumentsWatch on YouTubePlate 03How to Measure a Step Height with the Profilm3D
FilmetricsWatch on YouTube
What it is
The Filmetrics Profilm3D is an optical profilometer for non-contact surface topography measurement. The Profilm3D uses white light interferometry, and the Profilm3D series measures surfaces from nanometer scale to millimeter scale. The series includes the Profilm3D and Profilm3D-200 variants.[1][6]
How it works
General reference — not yet source-verifiedInterferometric profilers form height data by scanning focus or optical path through the surface region of interest and reconstructing a height map from the interference response. Such systems commonly support area scans rather than only single line traces, which makes them useful for areal texture, feature, and step analysis. Non-contact optical measurement is often chosen when a stylus could disturb soft, delicate, or high-aspect-ratio surface features.
Where it fits in the process flow
The Profilm3D series supports both R&D and production environments. The Profilm3D software procedure includes single scans and automated measurements on multiple sites, which fits use cases ranging from exploratory measurement to repeated inspection workflows.[1]
Applications
General reference — not yet source-verifiedOptical profilometers are used on surfaces where height variation carries process information. Common use cases include measuring etched relief, deposited film steps, polished surfaces, molded or machined microstructures, and textured functional coatings. Areal topography data can also support correlation with adhesion, friction, sealing, optical behavior, and fluidic performance.
- metal film thickness measurements
- surface profile measurements
- silicon thickness measurement
What do the numbers mean?
Vacuum & pumping1
Wafer handling1
Optics & imaging8
- Applications
- Step height, texture and form, edge rolloff, defect review, high resolution scans over large transparent film surfaces, and high roughness or low reflectivity surfaces[1]
- Application examples
- Universities, research labs and institutes; silicon and compound semiconductor; precision optics and mechanics; medical devices; LED; power devices; MEMS; data storage; automotive[1]
Performance3
Dimensions & facilities4
Configuration & options17
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Profilm3D-200 | — | — | Adds a larger motorized X-Y stage supporting 200 mm by 200 mm travel; also supports an adapter for holding up to 200 mm wafers. | kla.com[1] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Bruker ContourGT X 3 D Optical Profiler— Same function class: Precision Optics, UnknownCompare in depthsource[5]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Thickness range, PSI0 - 3μm[4]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Profilm3D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Profilm3D are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Profilm3D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Profilm3D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Profilm3D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Profilm3D are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (6)Every fact above is drawn from these public sources
- [1]kla.com — kla.comkla.com
- [2]Filmetrics Profilm3D - The Singh Center for Nanotechnology Wiki — wiki.nano.upenn.eduwiki.nano.upenn.edu
- [3]web.archive.org — web.archive.orgweb.archive.org
- [4]minateh.ruminateh.ru
- [5]Equipment inventory listing
- [6]https://nanofab.ku.edu/sites/nanofab/files/files/SOPs/Profilm3D%20SOP.pdf — nanofab.ku.edunanofab.ku.edu
Last updated Oct 18, 2026.
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