Filmetrics

Profilm3D

Precision Optics Filmetrics Profilm3D family

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Profilm3D — web.archive.org — Fig. 01Profilm3Dweb.archive.org^[1]

Plate 01Filmetrics® Profilm3D® Software Tutorial
KLA InstrumentsWatch on YouTube
Plate 02How to Measure a Step Height with the Filmetrics® Profilm3D® Optical Profilometer
KLA InstrumentsWatch on YouTube
Plate 03How to Measure a Step Height with the Profilm3D
FilmetricsWatch on YouTube

Performance

0.7% for an 8 µm step^[1]

Optics

optical profiler^[1]

What is it?

The sources describe Filmetrics Profilm3D as an optical profiler used in profilometry for metal film thickness measurements, with stated step-height accuracy of 0.7% for an 8 µm step. The same source also places Profilm3D in Filmetrics' lineup of tabletop, mapping, and production systems for measuring silicon up to 2 mm thick, and as a suitable instrument for profilometry-based thickness measurement.

What can it run?

Process applications and technology nodes documented for this tool.

metal film thickness measurements
surface profile measurements
silicon thickness measurement

What do the numbers mean?

Optics & imaging1

instrument type: optical profiler^[1]

Performance1

step-height accuracy: 0.7% for an 8 µm step^[1]

Configuration & options4

manufacturer: Filmetrics^[1]
model: Profilm3D^[1]
measurement method: profilometry^[1]
maximum silicon thickness stated on source page for tabletop/mapping/production systems: up to 2 mm thick^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
Profilm3D-200	—	—	Adds a larger motorized X-Y stage supporting 200 mm by 200 mm travel; also supports an adapter for holding up to 200 mm wafers.	kla.com^[2]

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Bruker ContourGT X 3 D Optical Profiler— Same function class: Precision Optics, UnknownCompare in depthsource^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the Profilm3D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Profilm3D are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Profilm3D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Profilm3D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Profilm3D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Profilm3D are on record.
Answerable by: an OEM parts catalog or a service engineer