Comparison ledger
Glenbrook RTX-113, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RTX-113Glenbrook | |
|---|---|---|
| OEM | Glenbrook | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Glenbrook RTX-113 | KLA .496 PSL Wafer |
| Specifications | ||
| System type | X-Ray system[1] | — |
| Applications | Drill registration of multilayer PC boards, BGA inspection, QFN inspection, cable inspection, multi-layer PCB applications, and medical devices[2] | — |
| Dimensions | 44 in H x 42 in W x 24 in D (1066.8 mm x 1117.6 mm x 609.8 mm)[2] | — |
| Operating voltage | 120 V, 60 Hz or 220 V, 50 Hz[2] | — |
| Contrast resolution | Can resolve 0.001 gold wire[2] | — |
| Spatial resolution | 20 lp/mm, up to 100 lp/mm with MicroTech option[2] | — |
| Anode voltage | 52 kV or optional 80 kV[2] | — |
| Anode current | 50 or 90 microamps[2] | — |
| Magnification | 15x geometric to 50x optical[2] | — |
| Focal spot to image plane distance | 4-6 inches[2] | — |
| X-ray activation mode | Foot pedal or PC controlled[2] | — |
| Focal spot size | 0.2 mm[3] | — |
| Installed options | Foot pedal[4] | — |
| Configuration | — | NIST Traceable[5] |
| Wafer size | — | 8 inch[5] |
| Traceability | — | NIST Traceable[5] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[5] |
| Category | — | Metrology & Inspection[6] |
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