Comparison ledger
Hitachi 1305 BSG 3, Semitool SAT Ozone Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SAT Ozone WaferSemitool |
|---|---|---|
| OEM | Hitachi | Semitool |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Semitool SAT Ozone Wafer |
| Specifications | ||
| Configuration | — | HydrOzone and FluorOzone[1] |
| Specs | — | 24000 W, 208V a.c., 3 Phase[1] |
| Ozone Generator A | — | MKS AX8403L Ozone Generator, Rev. 1B[1] |
| Ozone Destruct Upgrade (never installed) | — | INUSA Heated Catalytic Destruct Module, CAT03-H[1] |
| Process technology | — | HydrOzone and FluorOzone[1] |
| Bowl size | — | Single bowl, 24"[1] |
| DI Water Heater model | — | HCQ24-208-3-002-08[1] |
| DI Water Heater specs | — | 24000 W, 208V a.c., 3 Phase[1] |
| Ozone delivery system model | — | OZOMOD-STI-HO-0[1] |
| Ozone generator | — | MKS AX8403L Ozone Generator, Rev. 1B[1] |
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