Semitool
SAT Ozone Wafer
The Semitool SAT Ozone Wafer Cleaner is a single-bowl, 24-inch ozone wafer cleaning system with HydrOzone and FluorOzone process technology.[1][2]
What it is
How it works
The Semitool SAT Ozone Wafer Cleaner uses a single-bowl configuration and HydrOzone and FluorOzone process technology.[1][3][2]
The Semitool SAT Ozone Wafer Cleaner includes an ozone delivery system, an ozone generator and leak detection system, a DI water heater, and fire detection and suppression hardware.[1][2]
Where it fits in the process flow
Applications
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Repair failed ozone generation cell(s) in MKS AX8403L Ozone generator, Rev. 1B or trade in for MKS AX8407
- Computer upgrade to eliminate intermittent boot failures and reboot loops
- Replace front user interface; current one is cut off slightly and distorted at bottom of screen
- Install water flow interlock switch; currently by-passed
What do the numbers mean?
Power & electrical5
Vacuum & pumping1
- Spares Kit with Most Parts Including a White Knight pump[1]
Control & software4
Configuration & options16
- HydrOzone and FluorOzone[1]
- Single bowl, 24"[1]
- Process Technology DI Water Heater:[1]
- Model HCQ24-208-3-002-08[1]
- Semitool Ozone Delivery System:[1]
- Model OZOMOD-STI-HO-0[1]
- INUSA RB-5L Alarm De-Multiplexing[1]
- INUSA IN2000-5 Multi-Channel Low-Concentration Analyzer[1]
- CO2 Fire Detection and Suppression System:[1]
- Spares & Additional Parts:[1]
- Manganese Oxide Ozone Destruct Catalyst Media[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Specs24000 W, 208V a.c., 3 Phase[1]
- ConfigurationINUSA Ozone Generator and Leak Detection system:[1]
- Ozone Generator AMKS AX8403L Ozone Generator, Rev. 1B[1]
- ConfigurationSpares Kit with Most Parts Including a White Knight pump[1]
- DI Water Heater specs24000 W, 208V a.c., 3 Phase[1]
- Ozone generatorMKS AX8403L Ozone Generator, Rev. 1B[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the SAT Ozone Wafer are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the SAT Ozone Wafer are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the SAT Ozone Wafer are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the SAT Ozone Wafer are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the SAT Ozone Wafer is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the SAT Ozone Wafer are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]SAT Ozone Wafer — Semitool | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]Semitool SAT Ozone Wafer family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 13, 2026.
Compare with similar tools
View all →The Glen/YES 1000FP is a plasma cleaning system designed to accept a range of shelf sizes for changing flat panel industry needs.
The 1000P is a plasma cleaning system with four 16 x 16 inch shelves and a total capacity of 1024 square inches.
The Semitool 11600 SRD is a spin rinse dryer manufactured by Semitool.