Comparison ledger
Hitachi 1305 BSG 3, YES R3A-LMC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | R3A-LMCYES |
|---|---|---|
| OEM | Hitachi | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | YES R3A-LMC |
| Specifications | ||
| Model | — | R3A-LMC[1] |
| Designed for | — | fast, uniform cleaning of lead frames and carrier borne devices loaded into one or two open-sided magazines[1] |
| Chamber design | — | parallel plate design[1] |
| Plasma uniformity | — | uniform plasma throughout the magazine[1] |
| Plasma modes | — | Active Plasma mode, RIE Plasma, Electron-free Plasma[1] |
| Plasma direction | — | left to right, right to left, or from both sides simultaneously[1] |
| Plasma gas inputs | — | two plasma gas inputs[1] |
| Back-fill gas input | — | provided for venting the chamber back to atmospheric pressure in an inert atmosphere, normally nitrogen[1] |
| Diagnostics display | — | plain English[1] |
| Readouts | — | plain English[1] |
| Function | — | Automatic plasma cleaning of lead frames and Auer boats[1] |
| Target products | — | Lead frames and carrier borne devices loaded into one or two open-sided magazines[1] |
| Design | — | Parallel plate design[1] |
| Gas inputs | — | Two plasma gas inputs[1] |
| Control/readout language | — | Plain English readouts and diagnostics[1] |
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