Comparison ledger
Hitachi 8640 CD-SEM, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 8640 CD-SEMHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 8640 CD-SEM | KLA .204 PSL Wafer |
| Specifications | ||
| Configuration | Console[1] | NIST Traceable[3] |
| Manufacturer | Hitachi[2] | — |
| Model | 8640[2] | — |
| Equipment type | Critical Dimension Scanning Electron Microscope (CD-SEM)[2] | — |
| Wafer handling | Handler[1] | — |
| Wafer Size | — | 8 inch[4] |
| Traceability | — | NIST[5] |
| Compatible Tools | — | Surfscan 6xy0, Sp1[3] |
| NIST Traceable | — | Yes[4] |
| Compatible tools | — | Surfscan 6xy0 and Sp1 particle counters[4] |
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