Comparison ledger
Hitachi CG 4100, Lam Research SEZ203, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | CG 4100Hitachi | SEZ203Lam Research |
|---|---|---|
| OEM | Hitachi | Lam Research |
| Category | — | — |
| Wafer size | Wafer Equipment | Wafer Equipment |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi CG 4100 | Lam Research SEZ203 |
| Specifications | ||
| Wafer size | Wafer Equipment[1] | Wafer Equipment[2] |
| Date of Manufacture | 2013-01-01[1] | — |
| Currently Configured for | 300mm[1] | — |
| Missing or Damaged parts | Fab confirmed there were no missing or damaged parts.[1] | — |
| Vendor | HITACHI[1] | — |
| VID | VID761[1] | — |
| SW Version | 35.47[1] | — |
| Resolution | 1.8nm[1] | — |
| throughput | 42wafer/h[1] | — |
| MAM Time | 2.8sec[1] | — |
| Stage Landing Accuracy | ±1μm[1] | — |
| Manufacturer | — | LAM Research Corp.[3] |
| Model | — | SEZ203[2] |
| Description | — | Spinprocessor Typ 10[2] |
| Year of Manufacture | — | 2004[2] |
| Condition | — | Poor[3] |
| CE Marked | — | YES[2] |
| Version | — | 200 mm[4] |
| Completeness | — | partial - Z80 missing[2] |