Comparison ledger
Hitachi SU 3800 VP Electron, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3800 VP ElectronHitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi SU 3800 VP Electron | KLA 0035235-003 MMD Head |
| Specifications | ||
| P/N | 52 E 4918[1] | — |
| Configuration | 100 to 240 V[1] | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Current | 1.5 KVA[1] | — |
| Part Number | 52 E 4918[1] | — |
| Power Voltage | 100 to 240 V[2] | — |
| Frequency | 50/60 Hz[2] | — |
| Phase | Single Phase[2] | — |
| KVA | 1.5[1] | — |
| Vintage | 2021[1] | — |
| Included Accessories | Monitors, Control Panel, Track Ball, Sample Mounts, Cables, Hoses, Extra Filaments, Vacuum Pump, Air Compressor, CDs/DVDs for SEM Communication Setup[1] | — |
| Not Included | EDS, Plasma Cleaner[1] | — |
| Tool type | Scanning electron microscope (SEM)[2] | — |
| Application | Metrology & inspection[2] | — |
| Power consumption | 1.5 KVA[2] | — |
| Not included | EDS and plasma cleaner[1] | — |
| Model | — | 0035235-003[3] |
| Make | — | KLA[3] |
| Part Description | — | TSTD PCB ASSY, MMD MEAS HEAD[3] |
| Compatible System | — | KLA AIT-XP[3] |
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