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1205-1versusNanospec 210 Thin Film Measurement

JDSU 1205-1, Onto Innovation Nanospec 210 Thin Film Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1205-1JDSU
OEMJDSUOnto Innovation
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyJDSU 1205-1Onto Innovation Nanospec 210 Thin Film Measurement
Specifications
ManufacturerJDSU[1]Onto Innovation[3]
Model1205-1[1]Nanospec 210[3]
CategoryFiber Optic Equipment[1]—
ConditionUsed[1]—
Output Power0.5mW - 0.8mW[2]—
Input Voltage115V[2]—
Input Current0.12A[2]—
Equipment type—Thin film measurement system[3]
Thickness range—100 to 500,000 angstroms[4]
Typical measurement time—2.5 seconds[4]
Spot size—50 um with 5x objective; 25 um with 10x objective; 6.5 um with 40x objective[4]
Film types measured—Oxide on Silicon; Nitride on Silicon; Negative Resist on Silicon; Polysilicon on Oxide; Negative Resist on Oxide; Nitride on Oxide; Polyimide on Silicon; Positive Resist on Silicon; Positive Resist on Oxide[4]
Reflectance mode—Thick Films[4]
Reproducibility—5A ± 5% depending upon the film type[4]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]valuetronics.comvaluetronics.com
  2. [2]ntc-tech.comntc-tech.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]tech-semi.comtech-semi.com