Waferpedia

Comparison ledger

0035235-003 MMD Headversus2131

KLA 0035235-003 MMD Head, KLA 2131, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
2131KLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run—1994–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 0035235-003 MMD HeadKLA 21xx
Specifications
ConfigurationTSTD PCB ASSY, MMD MEAS HEAD[1]HDD[2]
Model0035235-003[1]—
MakeKLA[1]—
Part DescriptionTSTD PCB ASSY, MMD MEAS HEAD[1]—
Compatible SystemKLA AIT-XP[1]—
Manufacturer—KLA[3]
Category—Metrology & Inspection[3]
Type—inspection system[3]
Wafer sizes—6 inch[2]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
  5. [5]fab-spares.comfab-spares.com