Comparison ledger
KLA 0035235-003 MMD Head, KLA RS 75 Resistivity Mapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA RS 75 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | 220 Volts[2] |
| Model | 0035235-003[1] | RS 75[2] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Voltage | — | 120 V[3] |
| Manufacturer | — | KLA[2] |
| Equipment type | — | Resistivity Mapper[2] |
| Wafer size | — | 8 inch[2] |
| Electrical rating | — | 220 V, 1.8 kW, 50/60 Hz[2] |
| Vintage | — | 1996[2] |
| Measurement range | — | 5 mΩ/sq to 5 MΩ/sq[5] |
| Repeatability (VLSI) | — | < 0.2% (1σ)[5] |
| Accuracy (VLSI) | — | ±1%[5] |
| Edge exclusion | — | 3 mm from edge of film[5] |
| Throughput (5-site) | — | 100 WPH[5] |
| Alignment system | — | Notch/Flat aligner on Probe Arm[5] |
| Computer OS | — | DOS[5] |
| Software | — | Rev 6.22[5] |
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