Comparison ledger
KLA 0035235-003 MMD Head, Nikon Optiphot 200, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Optiphot 200Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | Nikon Optiphot |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | 50/60 Hz[2] |
| Model | 0035235-003[1] | Optiphot 200[3] |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Type | — | Semiconductor wafer inspection microscope[4] |
| Illumination | — | Brightfield / Darkfield[4] |
| Stage | — | 8" x 8" mechanical stage[4] |
| Eyepieces | — | 10x[4] |
| Objective lenses | — | Nikon CF Plan 5x, 10x, 20x[4] |
| Turret | — | Motorized with controller[4] |
| Adjustment | — | Coarse / Fine[4] |
| Microscope head | — | Trinocular head[4] |
| Electrical requirements | — | 120V / 60Hz / 15A / 1Ph[4] |
| Designation at EPFL | — | Inspection microscope[5] |
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