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Comparison ledger

1.112 PSL Waferversus.204 PSL Wafer

KLA 1.112 PSL Wafer, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1.112 PSL WaferKLA
.204 PSL WaferKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1.112 PSL WaferKLA .204 PSL Wafer
Specifications
ConfigurationNIST Traceable[1]NIST Traceable[3]
Wafer Size8 inch[1]8 inch[4]
NIST TraceableTrue[1]Yes[4]
Compatible ToolsSurfscan 6xy0 and Sp1[2]Surfscan 6xy0, Sp1[3]
Traceability—NIST[5]
Compatible tools—Surfscan 6xy0 and Sp1 particle counters[4]
1.112 PSL Wafer entry.204 PSL Wafer entryAsk about these tools →Share experience with this comparison →

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com