Comparison ledger
KLA 1.112 PSL Wafer, Olympus BX 3 RFAS Microscope Illuminator, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | Olympus |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Olympus BX 3 RFAS Microscope Illuminator |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Spectroscopy port (1-SPEC)[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Manufacturer | — | Olympus[5] |
| Model | — | BX 3 RFAS[5] |
| Category | — | Metrology & Inspection[5] |
| Equipment type | — | Microscope illuminator[5] |
| Spectroscopy port | — | 1-SPEC[4] |
| Brightfield illumination port | — | 2-BF[4] |
| Observation method | — | Reflected fluorescence, Transmitted observation[1] |
| Product category | — | Reflected light illuminator[1] |
| Illuminator field number | — | FN22[1] |
| Illuminator magnification | — | 1X[1] |
| Mirror unit positions | — | 8 positions[1] |
| Mirror unit encoding | — | Encoded 8 positions[1] |
| Weight | — | 3.9 kg[1] |
| Country of origin | — | China[1] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →