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BX 3 RFAS Microscope Illuminator

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The Olympus BX 3 RFAS Microscope Illuminator is a microscope illuminator made by Olympus. The Olympus BX 3 RFAS Microscope Illuminator features a spectroscopy port and a brightfield illumination port.[1][2]

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What it is

The Olympus BX 3 RFAS is a microscope illuminator in the metrology and inspection category. The Olympus BX 3 RFAS includes a spectroscopy port designated 1-SPEC. The Olympus BX 3 RFAS includes a brightfield illumination port designated 2-BF.[1][2][4]

How it works

The BX3-RFAS can connect through a coded function system that reads coded information from the illuminator and transmits that information externally. The BX3-RFAS connects to the U-CBS control box in that system. The coded function system can be used with BX43F and BX53F microscope frames. The coded function system provides an RS-232C connector and can be used with a DP21 microscope digital camera.[5]

Where it fits in the process flow

General reference — not yet source-verified

Microscope illuminators belong to the inspection and metrology layer of fab and laboratory work. Microscope-based inspection is typically used after patterning, deposition, etch, cleaning, or sample preparation steps when an operator needs direct visual review. Microscope illumination supports manual review, documentation, and optical examination rather than material addition or removal.

Applications

General reference — not yet source-verified

Microscope illumination is used for optical inspection tasks that require clear viewing of surfaces, films, particles, defects, edges, and structural features. Spectroscopy-capable optical configurations can also support material-oriented examination when the microscope is coupled to spectral analysis hardware. Brightfield observation is commonly used for routine review of sample appearance, contamination, and pattern condition.

What do the numbers mean?

Optics & imaging6

Brightfield illumination port (2-BF)[1]
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Equipment type
Microscope illuminator[2]
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Brightfield illumination port
2-BF[1]
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Product category
Reflected light illuminator[3]
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Illuminator field number
FN22[3]
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Illuminator magnification
1X[3]
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Dimensions & facilities1

Weight
3.9 kg[3]
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Configuration & options9

Spectroscopy port (1-SPEC)[1]
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Manufacturer
Olympus[2]
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Model
BX 3 RFAS[2]
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Category
Metrology & Inspection[2]
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Spectroscopy port
1-SPEC[1]
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Observation method
Reflected fluorescence, Transmitted observation[3]
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Mirror unit positions
8 positions[3]
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Mirror unit encoding
Encoded 8 positions[3]
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Country of origin
China[3]
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Vintage & configurations

Documented models & variants

DesignationGenerationVintageChangesSource
BX3-RFAS——Coded fluorescence illuminator for the BX3 series.adobeassets.evidentscientific.com[3]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

Who manufactures the BX 3 RFAS?

The BX 3 RFAS is manufactured by Olympus.[1][2]

What kind of equipment is the BX 3 RFAS?

The BX 3 RFAS is a microscope illuminator.[2]

What ports are called out for the BX 3 RFAS?

The BX 3 RFAS includes a spectroscopy port designated 1-SPEC and a brightfield illumination port designated 2-BF.[1][2][4]

What observation methods does the BX3-RFAS support?

The BX3-RFAS supports reflected fluorescence and transmitted observation.[3]

How is the mirror unit turret operated on the BX3-RFAS?

The BX3-RFAS uses manual rotation with click stops, and the turret has 8 encoded positions.[3]

Not publicly documented

The following facts about the BX 3 RFAS Microscope Illuminator are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the BX 3 RFAS Microscope Illuminator are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • The control-system platform and OS era of the BX 3 RFAS Microscope Illuminator are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the BX 3 RFAS Microscope Illuminator are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the BX 3 RFAS Microscope Illuminator is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the BX 3 RFAS Microscope Illuminator are on record.

    Answerable by: an OEM parts catalog or a service engineer

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Sources & citations

Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]adobeassets.evidentscientific.com — adobeassets.evidentscientific.comadobeassets.evidentscientific.com
  4. [4]Olympus BX 3 RFAS Microscope Illuminator family | Waferpedia — waferpedia.comwaferpedia.com
  5. [5]https://brandlab.coopersurgical.com/m/3c0d8bad21875233/original/Olympus-BX43-Manual-pdf.pdf — brandlab.coopersurgical.combrandlab.coopersurgical.com
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Last updated Oct 20, 2026.

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