Comparison ledger
KLA 1.112 PSL Wafer, Onto Innovation Nanospec AFT Metrology, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Nanospec AFT MetrologyOnto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Onto Innovation Nanospec AFT Metrology |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Manufacturer | — | Onto Innovation[3] |
| Model | — | Nanospec AFT[3] |
| Category | — | Metrology & Inspection[4] |
| Measurement method | — | Reflectometry[5] |
| Measurement target | — | Thickness of transparent thin films on silicon wafers[5] |
| Wafer diameters | — | 100 mm, 150 mm[6] |
| Wafer materials | — | silicon[6] |
| Wafer holder | — | delrin[6] |
| Wafer thickness | — | 200 .. 1000 µm[6] |
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