Comparison ledger
KLA 1.112 PSL Wafer, Woollam M-2000UI, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | M-2000UIWoollam | |
|---|---|---|
| OEM | KLA | Woollam |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Woollam M-2000UI |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Tool type | — | Ellipsometer[3] |
| Application | — | Thin film thickness measurement[3] |
| Measurement type | — | Spectroscopic ellipsometer[4] |
| Measured properties | — | Optical properties of metals, semiconductors, dielectrics, and polymers[5] |
| Spectral range | — | 246-1690nm[5] |
| Spectroscopic scans | — | At different angles from 40° to 90°[5] |
| Measurement modes | — | Isotropic measurements; reflectance mode[5] |
| Software | — | WVASE32[5] |
| Function | — | Measures thickness of transparent layers and optical constants of a layer[6] |
| Stage | — | Automated XY stage[6] |
| Stage movement range | — | 100 mm[6] |
| Sample size | — | The stage can hold larger samples; smaller samples are allowed[6] |
| Temperature range | — | Room temperature only[6] |
| Contamination | — | Both non-contaminated and contaminated samples are allowed[6] |
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