M-2000UI

The Woollam M-2000UI is an ellipsometer. The Woollam M-2000UI is used for thin film thickness measurement. The Woollam M-2000UI is also used for measuring the thickness of transparent layers and the optical constants of a layer.^{[4][3][2][1][5]}

The M-2000UI Ellipsometer performs spectroscopic scans at different angles from 40° to 90°. The Woollam M-2000UI has a wide spectral range of 246-1690nm with 660 wavelengths. The Woollam M-2000UI supports isotropic measurements. The Woollam M-2000UI includes reflectance mode. The Woollam M-2000UI uses WVASE32 software. The automated XY stage is used to measure nonuniformity of the parameters across the wafer. The X,Y stage movement range is 100 mm.^[2][3]

Ellipsometry is a non-contact metrology method used around deposition, oxidation, coating, and other film-forming steps. Ellipsometers typically sit in characterization flow where engineers verify whether a layer has reached the intended thickness or optical behavior before subsequent patterning, etch, or integration steps. Ellipsometers are also used after process development runs to map uniformity trends and support model-based material analysis.

The Woollam M-2000UI is used for measuring the optical properties of different materials such as metals, semiconductors, dielectrics, and polymers. The Woollam M-2000UI is particularly useful for measuring the thickness of thin transparent layers. The Woollam M-2000UI can measure nonuniformity across the wafer by using its automated XY stage. The stage can hold larger samples, and smaller samples are allowed.^[2][3]