Comparison ledger
KLA 1.112 PSL Wafer, Zeiss LSM 880 Confocal, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | LSM 880 ConfocalZeiss | |
|---|---|---|
| OEM | KLA | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Zeiss LSM 880 Confocal |
| Specifications | ||
| Configuration | NIST Traceable[1] | 2+1 CH NLO Ar, 561, 633[3] |
| Wafer Size | 8 inch[1] | — |
| NIST Traceable | True[1] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[2] | — |
| Microscope type | — | Laser scanning confocal microscope[4] |
| Airyscan | — | Equipped with Airyscan[4] |
| Laser lines | — | 405 nm, 458 nm, 488 nm, 514 nm, 561 nm, 594 nm, 633 nm; tunable 2P laser 720-1020 nm[5] |
| Detectors | — | 32 channel GaAsP-PMT area detector, two PMTs, and a transmitted light PMT for DIC imaging[4] |
| Objectives | — | 10x/0.3 Dry, 25x?08 Dry, 20x/0.8 Dry, 40x/1.2 oil, 63x/1.4 Oil[4] |
| Microscope mode | — | Upright laser scanning confocal microscope with multiphoton (NLO) laser[5] |
| Not Included | — | PC, Software[3] |
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