Comparison ledger
KLA 1007, Mahr MMQ 40 Form, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | MMQ 40 FormMahr |
|---|---|---|
| OEM | KLA | Mahr |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Mahr MMQ 40 Form |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | MMQ 40[3] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | Form tester[3] |
| Configuration | — | High precision sphere for accuracy[3] |
| OEM | — | Mahr[3] |
| High precision sphere | — | 50 mm[3] |
| Circular deviation | — | 0.00004 mm[3] |
| Probe compatibility | — | MFU / MMR / MMQ[3] |
| Adjustable angle | — | 110 degrees[3] |
| Adjustable measuring force | — | 0.5 to 0.005 N[3] |
| Type | — | MMQ 40[4] |
| Workpiece diameter | — | up to 350 mm[4] |
| Workpiece length | — | up to 450 mm[4] |
| Control | — | CNC-controlled[4] |
| Evaluation system | — | Form PC[4] |
| Included peripherals | — | TFT monitor, keyboard, mouse, printer[4] |
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