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Comparison ledger

1007versusMT 9510

KLA 1007, Multitest MT 9510, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1007KLA
MT 9510Multitest
OEMKLAMultitest
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced—2001
Production run—2001–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Multitest MT 9510
Cited variants—
  • MT 9510 Tri-Temp[1]
  • MT 9510 XP[1]
Specifications
ManufacturerKLA[2]—
Model1007[2]—
DescriptionWafer Prober[2]—
Wafer size150 mm[2]—
Convertible to 8 inch wafer sizeYes[2]—
Vintage01.06.1995[2]—
MakeKLA[3]—
Equipment typeProber[3]—
Configuration—VC1/10S3E BGA[4]
Max temp—175*C[8]
System—STD[9]
Temperature Range—-40/ 155[9]
Installed Kit—TQFP 7x7[9]
parallelism—Up to x16 test site parallelism[13]
temperature range—-55°C to +150°C[13]
throughput—Up to 5,300 UPH[14]
package support—QFP, BGA, Micro-BGA, CSP, TSSOP, PLCC, PGA, LGA, MLP/MLF[14]
package size—3 x 3 mm to 70 x 70 mm[14]
index time—0.38 seconds (XP) and 0.65 seconds (x16)[14]
footprint—1.19 m x 1.57 m (47 in x 62 in)[14]
weight—850 kg (1,900 lbs)[15]
device size—3 mm x 3 mm to 14 mm x 14 mm (for up to 8 contact sites)[15]

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Sources (15)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]inventory listing
  7. [7]inventory listing
  8. [8]inventory listing
  9. [9]inventory listing
  10. [10]inventory listing
  11. [11]inventory listing
  12. [12]inventory listing
  13. [13]waferpedia.comwaferpedia.com
  14. [14]cohu.comcohu.com
  15. [15]cohu.comcohu.com