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Comparison ledger

1007versusTUJR Ultra Low Temperature

KLA 1007, Tenney TUJR Ultra Low Temperature, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLATenney
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Tenney TUJR Ultra Low Temperature
Specifications
ManufacturerKLA[1]Tenney[4]
Model1007[1]TUJR[4]
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Temperature range—-75°C to +200°C[3]
Configuration—11" L × 16" W × 12" H interior workspace[4]
Voltage—115V, 60Hz, 18A[4]
Interior workspace—11" L × 16" W × 12" H[4]
LN₂ boost option—Installed[4]
Electrical supply—115V, 60Hz, 18A[4]
Category—Test & Probe[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing