Comparison ledger
KLA 1007, Ulvac Heliot 701 Helium Leak Detector, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | |
|---|---|---|
| OEM | KLA | Ulvac |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Ulvac Heliot 701 Helium Leak Detector |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | — |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | — |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | — |
| Make | KLA[2] | — |
| Equipment type | Prober[2] | — |
| Voltage | — | 115V, 50/60Hz, 1.0kVA[3] |
| Opt | — | Version: 1.6568[4] |
| Configuration | — | Unit powers on and passes all self start up tests[4] |
| Tool type | — | Helium leak detector[3] |
| Opt version | — | 1.6568[3] |
| Power line | — | AC 220V~50/60Hz 2.2kVA[5] |
| Weight | — | 43kg[5] |
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