Comparison ledger
KLA 200, KLA F 60 C XT Film Thickness Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 200 | KLA F |
| Specifications | ||
| Supported equipment family | KLA 200 series pattern inspection stations[1] | — |
| Related supported equipment | KLA Tencor 300 Series Pattern Inspection Stations, STARlight tools, and URSA tools[1] | — |
| Data hub function | 9X Fileservers are central data hubs serving KLA Tencor reticle inspection equipment[1] | — |
| Software function | 9X System Software supports storage and retrieval of setup and result files and several analysis functions[1] | — |
| Software | — | 2.7.0.0[2] |
| Wafer Handling | — | x1 Open Cassette Loader[2] |
| Wafer size | — | 8 inch[2] |
| Software version | — | 2.7.0.0[2] |
| Family | — | KLA F[3] |
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