Comparison ledger
KLA .204 PSL Wafer, KLA AIT XUV, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | AIT XUVKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2004 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA AIT XUV |
| Specifications | ||
| Configuration | NIST Traceable[1] | Broken items:[4] |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Laser wavelength | — | 364 nm[6] |
| Controller | — | APS4[5] |
| Equipment type | — | Inspection machine[4] |
| Make | — | KLA[4] |
| Model | — | AIT XUV[4] |
| Laser head | — | UV laser head, AIT, 364 nm[6] |
| Known broken items | — | Optical light bulb; laser channel 2[4] |
| OEM | — | KLA[4] |
| Broken items | — | optical light bulb; laser channel 2[4] |
| Product details | — | FRU, PCB, ASSY, APS4 controller[5] |
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