Comparison ledger
KLA .204 PSL Wafer, KLA AIT XUV Darkfield, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA AIT XUV |
| Specifications | ||
| Configuration | NIST Traceable[1] | Pillar[5] |
| Wafer Size | 8 inch[2] | 12 inch[6] |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Software Version | — | 6.3.24.3[4] |
| CIM | — | SECS / GEM[4] |
| Factory System | — | FOUPS[4] |
| Handler System | — | Robot[5] |
| Missing Parts | — | Incomplete Wafer Handler Module & Inspection Module[4] |
| Model | — | AIT XUV[4] |
| Category | — | Metrology & Inspection[6] |
| Vintage | — | 2006[6] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →