Comparison ledger
KLA .204 PSL Wafer, KLA eDR 5200 +, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | eDR 5200 +KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA eDR |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | Parts Machine[5] |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| Tool type | — | defect review scanning electron microscope (DR-SEM)[6] |
| Category | — | Metrology & Inspection[7] |
| Version | — | 300 mm[1] |
| Technology summary | — | High resolution imaging for classification of less than 50nm defects[1] |
| EDX capability | — | defects less than 100nm in diameter[1] |
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