Comparison ledger
KLA .204 PSL Wafer, KLA Ergolux, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ErgoluxKLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Ergolux |
| Cited variants | — |
|
| Specifications | ||
| Configuration | NIST Traceable[2] | — |
| Wafer Size | 8 inch[3] | — |
| Traceability | NIST[4] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[2] | — |
| NIST Traceable | Yes[3] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[3] | — |
| Equipment type | — | Microscope[5] |
| Manufacturer | — | KLA / Leica[5] |
| Model | — | Ergolux[5] |
| Category | — | Metrology & Inspection[6] |
| Wafer size | — | 6 inch[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →