Comparison ledger
KLA .204 PSL Wafer, KLA Surfscan SP 1 DLS BSIM Particle Defect, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | KLA Surfscan SP 1 DLS BSIM Particle Defect |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | 200/300mm[4] |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Laser Source | — | Argon Ion Laser[4] |
| Wavelength | — | 488 nm[4] |
| Defect Sensitivity | — | 0.050 µm on polished bare silicon[4] |
| Inspection Type | — | Unpatterned surface inspection[4] |
| Handler | — | 300mm Single FOUP/FIMS (other handlers available)[4] |
| Real-Time Defect Classification | — | RTDC included[4] |
| Enhanced Rough Film Sensitivity | — | Included[4] |
| Additional Software Features | — | Defect Map and Histogram with Zoom, Map to Map[4] |
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