Comparison ledger
KLA .204 PSL Wafer, Nikon Optiphot150, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Optiphot150Nikon | |
|---|---|---|
| OEM | KLA | Nikon |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA .204 PSL Wafer | Nikon Optiphot150 |
| Specifications | ||
| Configuration | NIST Traceable[1] | — |
| Wafer Size | 8 inch[2] | — |
| Traceability | NIST[3] | — |
| Compatible Tools | Surfscan 6xy0, Sp1[1] | — |
| NIST Traceable | Yes[2] | — |
| Compatible tools | Surfscan 6xy0 and Sp1 particle counters[2] | — |
| Model | — | Nikon Optiphot 150[4] |
| Type | — | inspection microscope[4] |
| Inspection microscope without camera locations | — | Z11, Z17[4] |
| Head type | — | Three-eye erecting head[5] |
| Eyepiece | — | WF10X (F.N.20mm)[5] |
| Objective lenses | — | CF PLAN 5X, 10X, 20X, 50X, 100X[5] |
| Illumination | — | 12V100W halogen incident light source[5] |
| Stage | — | Large 6-inch mobile platform[5] |
| Stage platform | — | Large 6-inch mobile platform[5] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →