Waferpedia

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.204 PSL WaferversusD 9650 C-SAM Acoustic

KLA .204 PSL Wafer, Nordson D 9650 C-SAM Acoustic, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferNordson D 9650 C-SAM Acoustic
Specifications
ConfigurationNIST Traceable[1]Single Phase[4]
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
VRM—FDI[4]
Manufacturer—Nordson / Sonoscan[4]
Model—D 9650 C-SAM[4]
Tool type—Acoustic microscope[5]
Category—Metrology & Inspection[5]
Power—Single Phase[5]
Electrical—AS/NZS 3112 10A, 250V[5]
Control/software—Sonolytics2 and Windows 10[4]
Software—Sonosimulator Software[4]
Option—Thickness Measurement Module (manual)[4]
Monitor—Second 24" Monitor (D96)[4]
Megapixel—8k - 67 Megapixel[4]
Vintage—2021[4]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]waferpedia.comwaferpedia.com