Waferpedia

Comparison ledger

.204 PSL WaferversusXD 7600 NT

KLA .204 PSL Wafer, Nordson XD 7600 NT, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
XD 7600 NTNordson
OEMKLANordson
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferNordson XD 7600 NT
Specifications
ConfigurationNIST Traceable[1]Includes HDD and Software[4]
Wafer Size8 inch[2]—
TraceabilityNIST[3]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[2]—
Compatible toolsSurfscan 6xy0 and Sp1 particle counters[2]—
Operating System—Windows XP[4]
Phase—1 Phase[5]
X-ray tube type—Sealed-transmissive (NT100)[6]
X-ray tube max voltage—160 kV[7]
X-ray tube power—10 W[6]
Feature recognition resolution—< 0.1 µm[7]
Detector—χiDAT3 Digital Image Intensifier, 2 MP @ 25 fps[7]
Geometric magnification—2,000×[7]
System magnification—12,000×[7]
Total digital zoom magnification—60,000×[7]
Max sample dimensions—736 mm × 580 mm (29″ × 22.8″)[7]
Tilt capability—Up to 70° at constant magnification[7]
Display—Dual 24″ TFT LCD Monitors[7]
Active X-ray Image Stabilization (AχiS)—Standard[7]
Power—Single Phase 200-230Vac, 16A, 50/60 Hz[6]
Max power consumption—1000 W[6]
System weight—1950 kg (4300 lbs)[6]
Equipment type—X-ray inspection system[4]
Category—Metrology & Inspection[8]
Feature recognition—below 0.1 µm[8]
Includes—HDD and Software[4]

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Sources (8)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]cohpros.comcohpros.com
  7. [7]instrumenthive.cominstrumenthive.com
  8. [8]waferpedia.comwaferpedia.com